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| Publisher | Springer; Softcover reprint of hardcover 1st ed. 2005 edition |
| ISBN 13 | 9781441952721 |
| ISBN 10 | 1441952721 |
| Author | Hector Santos |
| Book Format | Paperback |
| Language | English |
| Book Description | Chapter 1 Nanoelectromechanical Systems Chapter 2 NanoMEMS Physics: Quantum Wave-Particle Phenomena Chapter 3 NanoMEMS Physics: Quantum Wave Phenomena Chapter 4 NanoMEMS Applications: Circuits and Systems Chapter 5 NanoMEMS Applications: Photonics |
| About the Author | Héctor J. De Los Santos is president and CTO of NanoMEMS Research LLC in Irvine, California. He is also the author of successful RF MEMS book that Artech House published. He is a respected person within the MEMS and NEMS community |
| Publication Date | 21 January 2011 |
| Number of Pages | 272 pages |
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